If you cleaned the MAF and its worst ,then you need a new MAF!Does the car run fine with MAF disconnected?
See my post #3 above for how to check vac reservoir and system!
To answer your previous question on what EGR vac pipe to disconnect!Remove the inside black engine cover (the one that goes over the power steering reservoir) and on the right side (looking from the front of the car ) you will an EGR valve connected directly to inlet manifold and you will have small 6mm a vach hose pipe attached to it!Remove and blank the hose pipe with a 6mm M10 screw.Test car with this and see if any different!
With error symptons,like you described ,you most definitely have error codes stored in ECU!
Read it and it will point you in the right direction
You could have a loose or leaking pressure pipe or vaccum!"

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2003 BMW X5 E53 3.0D-Auto, Sportpack,full extras.
Oxford green/Leder Dakota interior.
56, 875miles @24th October 2024
Heavily OE modded,including full facelift grill install.4.6is body kit,wheels,exhaust tips and ext.fender flares
Non OE mods.Depo "custom" Angel eye headlights.