Diesel MAF's are in a totally different location than the Petrol versions and are a buggar to get to.
You dont want to clean it. If you are taking the time to remove it, replace it. I got an OEM Bosch unit for about AU$240 from Germany (off ebay. I can send you the info if you want)
I just replaced mine last weekend.
There are NO DIY tutorials for the Diesel and I didnt write one or take photos.
However, I can supply the steps to do so.
Basically, you follow the same procedures in getting to the air filter to replace, except you dont have to remove the micro filter unit or fully remove the filter, only the side cover.
There are two HEX screws you need to remove, then you need to remove two reverse torx screws (sometimes known as eTorx).
The Allen Screws are easy (fiddly) but the bottom Torx is hard. What I learnt when putting the new MAF in and screwing the bottom torx in, is that the air pipe that attaches to the MAF, can be rotated anticlockwise about 3 inches (or from the front of the car leftwards). This allows easy access.
It took me 3.5 hours to do (30 mins to find the lost torx socket I dropped down to the cross member and 40 mins getting the bottom torx screw out). So, now that I have done it, I am sure it would take about 1 hour. I suggest taking it slow first.
Hope this helps. Let me know if you need more info.
Regards,
Rob