First of all, I'd like to thank ggj13557 for posting this issue and solution.
I had my 2001 x5 throttle body cleanup myself an hour ago, and after I was
done and assembled everything back, started the engine, and the problem showed.
The engine rmp jump up and down, car shaking, check engine light is on, and all
seem a disaster begun.

I search the web like crazy trying to find solution... after a few tries without
luck, I see this post, saying about something stuck the throttle body.
I recalled that when I wiped the throttle body with cleaner I tore off a few piece
of workshop paper (blue color from auto part) inside, but I thought that I had it
removed.
With a strong hope and pray for help.
I redo everything from beginning again, and luckily I found a piece of paper stuck at the throttle body, I had to use mirror to see it inside since the throttle body of X5 is kind of lower inside.
After removed the paper and made sure the butterfly value is freely close and open and assembled everything, the engine starts fine.

Really thanks for the tip.