Had an oil leak from the vacuum pump on my X5 2005 (N62 engine). Replaced the two pump seals. Got the seal kit from bmpdesign.com for only $17. Dealer sells only the seal between the pump and timing cover. The leak is usually from the pump cover itself rather than between pump and timing case. No use to replace the entire pump if the pump cover is leaking.

BmpDesign.com have an excellent DIY for the repair on their website.

Here's a link to the DIY to the brake booster vacuum pump seals removal & installation‏
BMW News, Parts, and Repair Tech Tips by BMP Design: Tech Tip: BMW Brake Booster Vacuum Pump Seal Kit Removal & Installation (V8 N62 Engines)

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'05 E53 X5 4.4i, '97 E39 528, '07 E92 335i, '16 F86 X6M.