Item 1 (boost solenoid/vacuum solenoid) on your picture would be my next stop after checking the lines. As this solenoid controls the application of vacuum to the actuator. They can be serviced quite easily, just have a look on YouTube..... but equally you will have to remove it to service it so it’s easy to just get a new one and replace it if you suspect it’s bad.
Item 6 (vacuum accumulator/tank..... if you can have a tank full of vacuum lol) have been know to leak from cracks and pinholes. So easy to whip it off, seal one end, use a tyre pump (even a bike one will do) apply some pressure Into it and spray some soapy water over it and look for bubbles. These are fixable with some epoxy to where the leak is. But again is quite cheap second hand as they are used on all BMW diesels of this era
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E53 3.0d Sport 119,000 Miles
E61 535d Estate - Hybrid turbos and Dark-side intercooler...389hp,792nm
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